Servo Controller For Electrostatic Micro-actuators

No abstract is available in the live database for this paper.

Authors

• Hideki Hashimoto
• Kwee-Bo Sim
• Hiroyuki Fujita
• Fumio Harashima

Keywords

• Servomechanisms
• Microactuators
• Electrodes
• Friction
• Insulation
• Electrostatic actuators
• Motion estimation
• Acceleration
• Silicon
• Hardware
• Servo Control
• Electrode
• Actuator
• Optimal Control
• Control Input
• Friction Coefficient
• Electrostatic Forces
• Moment Of Inertia
• Tracking Error
• Nonlinear Terms
• Friction Force
• Position Tracking
• Mechanical Movement
• Static Friction
• Viscous Friction
• Inertial Term
• Coulomb Friction
• Stable Motion
• Dynamic Friction
• Free Body Diagram
• Perfect Tracking