Two-dimensional, vision-based muN force sensor for microrobotics

We present a two-dimensional, vision-based force sensor, capable of sensing muN level forces. There are currently no reliable, off-the-shelf, commercially-available force sensors to measure forces at this scale, that can be easily integrated into standard microrobotic test-beds. Our design consists of a planar, elastic mechanism with known force-deflection characteristics. A CCD camera is used to track the deformation of the mechanism as it is used to manipulate objects in a micro/meso-scale robotic manipulation test-bed. By observing the displacements of select points in the mechanism, the manipulation forces can be estimated. The modeling, design, microfabrication, calibration and experimental validation of the force sensor are presented with a brief discussion of an application to a robotic manipulation tasks such as microassembly.

Authors

• David J. Cappelleri
• Gianluca Piazza
• Vijay Kumar 0001

Keywords

• Force sensors
• Testing
• Robot sensing systems
• Current measurement
• Force measurement
• Measurement standards
• Charge coupled devices
• Robot vision systems
• Charge-coupled image sensors
• Cameras
• Force Sensor
• CCD Camera
• Microfabrication
• Robot Manipulator
• Sensor Calibration
• Displacement Of Point
• Mechanical Point
• Elastic Mechanics
• Prototype
• Material Properties
• Young’s Modulus
• Finite Element
• Atomic Force Microscopy
• Finite Element Analysis
• Compression Tests
• Direction Of Force
• Design Space
• Low Stiffness
• Stiffness Values
• Range Of Forces
• Tetrabutylammonium Fluoride
• Force-distance Curves
• Contact Stiffness
• Indentation Tests
• Wet Etching
• Displacement Data
• Point Tracking
• Node Of Interest
• Commercial Products
• Image Frames