IROS Conference 2025 Conference Paper
Compact R-X-Y Stage and Dual-Finger Micromanipulator under Inverted Optical Microscope for Microassembly
- Jichao Pang
- Zhuo Chen 0006
- Yan Chen
- Yuke Li
- Yunsheng Li
- Qiang Huang 0002
- Tatsuo Arai
- Xiaoming Liu 0007
Microassembly plays an important role in fabricating complex structures with small basic components in industrial and biomedical fields. Inverted optical microscope could provide high-quality image feedback for microassembly with its continuously improving resolution. However, a compact stage capable of positioning and reorienting micro-objects while fitting within the limited space under an inverted optical microscope remains unavailable. This paper proposes a compact R-X-Y stage that can transport micro-objects over long distances in the X and Y directions, and reorient the objects by the 360-degree continuous rotation. Additionally, different from commonly putting the rotational stage on the X-Y stage, we mount the thin X-Y stage on a rotational stage. Thus, after aligning the centers of the visual field and rotational stage at the beginning, all the visiable micro-objects will not move out of the visual field during the rotation. We further integrate the R-X-Y stage and the dual-finger micromanipulator, and then use them to assemble 2-D patterns and complex 3-D micromachine. The obtained results and preliminary demonstration indicate that the proposed compact R-X-Y has great potential in assembling complex micromachines.