EAAI Journal 2026 Journal Article
Enhanced visual state space model for real-time wafer defect detection
- Rui Sun
- Dejin Zhao
- Jiajian Meng
- Jialin Li
- Jingzhe Zhang
- Bo Li
- Dexin Kong
- Xu Zhu
Against the backdrop of the growing demand for high-performance computing chips, the real-time detection and classification of wafer defects have become crucial for ensuring the stability of semiconductor manufacturing and enhancing product competitiveness. This study presents a novel real-time wafer defect detection model designed to address the challenges of detecting small-scale and subtle defects under complex inspection scenarios. A high-resolution optical imaging system was built to acquire detailed wafer defect images, and a dataset covering six representative defect categories was constructed for model training and evaluation. To enhance feature representation, we introduce an improved feature modeling layer that efficiently captures spatial dependencies, enabling more accurate interpretation of complex defect patterns with low computational cost. An adaptive multi-branch fusion mechanism is further designed to dynamically adjust receptive field sizes according to defect characteristics, facilitating effective multi-scale feature interaction. Moreover, an enhanced denoising detection strategy is incorporated to suppress background noise in high-resolution images, thereby highlighting critical defect regions and improving the detection of tiny defects. Experimental results demonstrate that the proposed model outperforms existing methods in terms of accuracy, inference speed, and parameter efficiency. Compared with the baseline model on the Wafer Defect (WD) dataset, our approach achieves a 3. 8% improvement in Mean Average Precision(mAP) and a 2. 3% increase in Mean Average Precision at IoU = 0. 50(mAP_50). Validation on the Northeastern University Detection(NEU-DET) dataset and Optical Surface Micro-Defect (OSMD) dataset further confirms its strong generalization and potential for broader industrial applications.